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Patent Searching and Data


Title:
MONITORING DEVICE FOR CIRCULATION FILTER SYSTEM
Document Type and Number:
Japanese Patent JPH01148319
Kind Code:
A
Abstract:

PURPOSE: To carry out the monitoring of operational state with high accuracy in a circulation filter system provided with an air-driven pump by providing a specified change-over valve, a main valve, an air releaf groove, an electrode sensor, position sensors, a signal generation means and an alarm generation means.

CONSTITUTION: When the expanding and contracting membranes 8, 8' of an air-driven pump 3 are damaged and chemical liquid is leaked, the electrode sensor 51 provided in the air releaf groove 22 is submerged in the chemical liquid to become conductive so that the signal of the leakage of the chemical liquid is outputted. This detecting signal works as the demand signal for the alarm generating means 46 to issue alarm as well as works as the closing signal for the main valve 25 of a driving air pressure supply system to carry out the emergency stop. The position sensors 21, 21' detect whether the shaft member 17 which reciprocates for the membranes 8, 8' reaches each dead point, and output the detecting signal. Based on this detecting signal, a signal generating means 37 calculates the operation speed of the air-driven pump 3 to output the display signal of operation speed.


Inventors:
MIYAKE TAKAO
MAKIMOTO MICHIO
TOMITA SHIGERU
Application Number:
JP30795487A
Publication Date:
June 09, 1989
Filing Date:
December 04, 1987
Export Citation:
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Assignee:
KURASHIKI BOSEKI KK
International Classes:
B01D35/14; B01D37/04; F04B43/02; F04B43/06; H01L21/02; (IPC1-7): B01D35/14; B01D37/04; F04B43/02; F04B43/06
Attorney, Agent or Firm:
Aoyama Ryo (2 outside people)