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Patent Searching and Data


Title:
MONITORING DEVICE OF VACUUM IN VACUUM APPARATUS USED IN CONNECTION TO HIGH POTENTIAL
Document Type and Number:
Japanese Patent JPS59206733
Kind Code:
A
Abstract:

PURPOSE: To monitor the degree of vacuum visually even if a vacuum apparatus is connected to high potential by forming a fluorescent material layer to be acted by an electric field increasing in accordance with the rise of the degree of vacuum close to the vacuum apparatus.

CONSTITUTION: A pair of electrodes 1, 2 are arranged in a shield 7 and a vacuum monitoring device 8 is arranged on the outside of the shield 7. The layer of an electroluminescent fluorescent material 9 is formed on the surface of a glass plate 10 provided with an electrode 11. When a pressure in a vacuum case is low, the voltage between the shield 7 and the electrode 11 is low, so that an electric field applied to the fluorescent material 9 is low and light is not almost emitted. When the pressure is increased, the voltage between the shield 7 and the electrode 11 is increased and the fluorescent material 9 emits light. The emitted light is guided to a photoelectrical conversion element 14 through the transparent electrode 11 and the output of the element 14 is measured by a detector 16 through a resistor 15. The degree of vacuum is detected from the detected fluorescent intensity.


Inventors:
SUZUKI SETSUO
MORIMIYA OSAMU
Application Number:
JP6997883A
Publication Date:
November 22, 1984
Filing Date:
April 22, 1983
Export Citation:
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Assignee:
TOSHIBA KK
International Classes:
H01H33/66; G01L21/00; H01H33/668; (IPC1-7): G01L21/00
Attorney, Agent or Firm:
Noriyuki Noriyuki