Title:
監視装置および真空ポンプ
Document Type and Number:
Japanese Patent JP6583122
Kind Code:
B2
Abstract:
A vacuum pump includes; a rotor, a stator, a motor, a heating section heating the pump base portion, a base temperature detection section detecting a temperature of the pump base portion, a rotor temperature detection section detecting a temperature equivalent as a physical amount equivalent to a temperature of the rotor, and a heating control section to control heating of the pump base portion by the heating section such that a detection value of the rotor temperature detection section falls within a predetermined target value range. A monitoring device comprises: an estimation section configured to estimate, based on multiple temperatures detected over time by the base temperature detection section, maintenance timing at which the temperature of the pump base portion reaches equal to or lower than a predetermined temperature; and an output section configured to output maintenance information based on the estimated maintenance timing.
Inventors:
Junichiro Kozaki
Application Number:
JP2016086146A
Publication Date:
October 02, 2019
Filing Date:
April 22, 2016
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04
Domestic Patent References:
| JP201180407A | ||||
| JP2004117091A | ||||
| JP2006194094A |
Foreign References:
| WO2013161399A1 |
Attorney, Agent or Firm:
Fuyuki Nagai