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Patent Searching and Data


Title:
MONODISPERSE COPOLYMER AND PREPARATION THEREOF
Document Type and Number:
Japanese Patent JPH0641244
Kind Code:
A
Abstract:

PURPOSE: To obtain a monodisperse copolymer satisfactory in the performance required of a polymer for use in a resist material by the anionic polymn. of two kinds of specific styrene deriv. monomer.

CONSTITUTION: A monomer of formula I is copolymerized with a monomer of formula II by anionic polymn. to obtain a monodisperse copolymer having units of formula III and units of formula IV. The anionic polymn. may be conducted in a solvent-free system, but is pref. conducted in an org. solvent from the viewpoint of easy control of the reaction rate, etc. The use of tetrahydrofuran in particular as the org. solvent is preferable. The copolymer has a narrow as the org. solvent is preferable. The copolymer has a narrow mol.wt. distribution and is monodisperse, and hence, is satisfactory in the performance required of a polymer for use in a resist material with a high resolution.


Inventors:
Watanabe, Osamu
Yamada, Motoyuki
Application Number:
JP1992000218471
Publication Date:
February 15, 1994
Filing Date:
July 24, 1992
Export Citation:
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Assignee:
SHIN ETSU CHEM CO LTD
International Classes:
C08F212/14; C08F12/00; C08F297/02; (IPC1-7): C08F212/14; C08F297/02
Attorney, Agent or Firm:
滝田 清暉