To provide a diaphragm type manometer of low cost.
The manometer includes a monolithic base 102 which has an upper surface and a sidewall elongated more highly than the upper surface, a plurality of electric conductive elements 112 which are supported the upper surface of the base, a diaphragm 108 which is located the upper part of the electric conductive element for the upper surface of the base, connected with the sidewall of the base, and a cover 104 covering the base over the upper part of the diaphragm. Also, there are provided a glass film 110 connected with the base and an electric circuit, connecting with the electric conductive elements, configured to detect a change of a parasitic capacitance coupling between the electric conductive elements which are reacting to the moving diaphragm according to a pressure change.
SIPKA JOSEPH
REED CHRISTOPHER
| JP2000028463A | 2000-01-28 | |||
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Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Otsuka Sumie