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Patent Searching and Data


Title:
MONOMER OR POLYMER HAVING FLUORINE-CONTAINING ACETAL OR KETAL STRUCTURE, AND CHEMICAL AMPLIFICATION RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2003252928
Kind Code:
A
Abstract:

To provide a polymer which is excellent in transparency and suitable for a resist resin in a chemical amplification resist for photolithography using an exposure light at a wavelength of 180 nm or less.

The polymer comprises having repeating units and being obtained by polymerizing a polymerizable monomer having a fluorine-containing acetal or ketal structure represented by formula (1) (wherein R is an atomic group containing a polymerizable carbon-carbon double bond, R1 and R2 are either a 1-20C fluorinated alkyl or aryl group, and R3 is a group selected from the group consisting of hydrogen, a 1-20C alkyl group, an alkoxy-substituted alkyl group, a fluorinated alkyl group, an aryl group, a fluorinated aryl group, an aralkyl group and a fluorinated aralkyl group).


Inventors:
MAEDA KATSUMI
NAKANO KAICHIRO
Application Number:
JP2002051285A
Publication Date:
September 10, 2003
Filing Date:
February 27, 2002
Export Citation:
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Assignee:
NEC CORP
International Classes:
G03F7/039; C07C69/653; C08F12/22; C08F16/14; C08F20/36; C08F20/42; C08F32/00; H01L21/027; (IPC1-7): C08F16/14; C07C69/653; C08F12/22; C08F20/36; C08F20/42; C08F32/00; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)