Title:
電鋳用母型
Document Type and Number:
Japanese Patent JP7157841
Kind Code:
B2
Abstract:
To provide a mother die for galvanoplasty that can suppress volume changes such as shrinkage of adhesive layers in a multilayered mother die, avoid changes that affect each part of the mother die, and prevent changes over time that appear as misalignment of the mask body formed by electroforming on the mother die, thereby improving the accuracy of the mask.SOLUTION: There is provided a mother die for galvanoplasty used for manufacturing masks with a large number of holes by electrocasting, comprising an electrically conductive base section, a sheet-like adhesive layer that has an adhesive function and is placed on top of the base section, and one or more sheets of conductive layers that are electrically conductive and are bonded to the base section via the adhesive layer. The middle portion surrounded by a frame portion in a predetermined range from the outer edge of the adhesive layer is configured to have less changeability in volume over time than the frame portion and less adhesive force to bond the base section to the conductive layer.SELECTED DRAWING: Figure 1
Inventors:
Kiichiro Ishikawa
Hirohito Tamaru
Yusuke Urano
Hirohito Tamaru
Yusuke Urano
Application Number:
JP2021063028A
Publication Date:
October 20, 2022
Filing Date:
April 01, 2021
Export Citation:
Assignee:
Maxell Co., Ltd.
International Classes:
C25D1/10; H01L27/32
Domestic Patent References:
| JP6904852B1 | ||||
| JP2005015908A | ||||
| JP2007280774A | ||||
| JP2005212476A | ||||
| JP2001254193A |
Foreign References:
| WO2013054786A1 |
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