Title:
モータ制御装置、ダイボンディング装置および半導体装置の製造方法
Document Type and Number:
Japanese Patent JP7408434
Kind Code:
B2
Abstract:
The present invention is to provide a device capable of a synchronous operation of a motor of a different command system. A motor control device comprises: (a) a first ideal waveform generation unit; (b) a second ideal waveform generation unit; (c) a command waveform generation unit configured to read an ideal waveform from the second ideal waveform generation unit, regenerate a command waveform of more acceleration, acceleration, velocity and a position based on a real position by a second encoder signal outputted from a second motor and a target command position, which is an ideal command waveform of the position, and output a command waveform of the regenerated velocity; (d) a first output circuit for generating a pulse stream based on a command waveform generated by the first ideal waveform generation unit; and (e) a motion controller having a second output circuit that converts the regenerated command waveform of the velocity into analog data.
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Inventors:
Mitsuaki Tate
Application Number:
JP2020029520A
Publication Date:
January 05, 2024
Filing Date:
February 25, 2020
Export Citation:
Assignee:
Fasford Technology Co., Ltd.
International Classes:
H02P5/52; H01L21/52; H01L21/60
Domestic Patent References:
| JP4178190A | ||||
| JP2018157046A | ||||
| JP2017224640A |
Attorney, Agent or Firm:
Polaire Patent Attorneys Corporation