Title:
MOTOR-DRIVEN STAGE CONTROLLER
Document Type and Number:
Japanese Patent JPH0511850
Kind Code:
A
Abstract:
PURPOSE:To provide the motor-driven stage controller which smoothly move a stage in a very slow speed range and prevents the cost from increasing and the device from becoming large. CONSTITUTION:The state of an electric motor 7 for stage driving is detected by an incremental encoder 1, the deviation of its state detection signal from a command is inputted to a PID arithmetic part 13 at specific sampling time to generate a control signal, which is supplied to the electric motor 7 to control the position of the stage. This motor-driven stage controller is equipped with a means which varies the differential control cycle of the differential arithmetic system 14 of the PID arithmetic part 13 according to the driving speed.
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Inventors:
TAKAHASHI HAJIME
Application Number:
JP4278491A
Publication Date:
January 22, 1993
Filing Date:
February 15, 1991
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G05B21/02; G05D3/12; (IPC1-7): G05B21/02; G05D3/12
Attorney, Agent or Firm:
Takehiko Suzue
Next Patent: JPH0511851