Title:
マウントフランジの端面修正方法及び切削装置
Document Type and Number:
Japanese Patent JP6689534
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of correcting an end surface of a mount flange that is capable of properly and easily determining whether or not correction of an end surface is complete.SOLUTION: A method of correcting an end surface of a mount flange (42) includes a correction step of correcting an end surface with a grinding grindstone (64) of an end surface correction jig (18) by bringing an end surface (42a) of the mount flange into contact with the grinding grindstone while rotating a spindle (40), a measuring step of electrically measuring a state of contact between the grinding grindstone and the end surface by applying a voltage between a holding table (14) bearing the end surface correction jig thereon and the spindle after performing the correction step and bringing the grinding grindstone into contact with the end surface while rotating the spindle, and a determination step of determining that a correction of the end surface is completed when the state of contact measured by the measuring step is stable and that the correction of the end surface is not complete when the state of contact state is unstable.SELECTED DRAWING: Figure 8
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Inventors:
Manpei Tanaka
Seo Jun Young
Shintaro Matsuoka
Seo Jun Young
Shintaro Matsuoka
Application Number:
JP2016118167A
Publication Date:
April 28, 2020
Filing Date:
June 14, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B7/16; B24B27/06; B24B49/10; H01L21/301
Domestic Patent References:
| JP2011011299A | ||||
| JP2011224666A | ||||
| JP2015205372A |
Foreign References:
| US4825596 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro