Title:
MOUNTING TABLE AND PLASMA PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2014195047
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To suppress the unevenness of temperature in a central region and an end region of an object to be processed.SOLUTION: A mounting table comprises: a base portion in which a flow passage for refrigerant is formed; and an electrostatic chuck which has a mounting surface where an object to be processed is mounted and which electrostatically attracts the object to be treated. The base portion comprises: a first upper surface where the electrostatic chuck is mounted; an annular second upper surface where a focus ring is mounted which is provided at a position outer than the first upper surface and lower than the first upper surface; and a side surface which extends in a vertical direction between the first upper surface and the second upper surface. The flow passage has a central flow passage and a peripheral flow passage. The central flow passage extends under the first upper surface. The peripheral flow passage extends under the second upper surface and includes a part which extends in a direction where the first upper surface is provided along the side surface under the first upper surface. A plurality of protrusions contacting the back surface of the object to be processed are provided in the shape of dots on the mounting surface. With regard to the size per unit area of the area where a plurality of protrusions contact the back surface of the object to be processed, the end region of the mounting surface is larger than the central region of the mounting surface.
Inventors:
TOMIOKA TAKETOSHI
GOHIRA TAKU
MAKABE AKIYUKI
GOHIRA TAKU
MAKABE AKIYUKI
Application Number:
JP2014014180A
Publication Date:
October 09, 2014
Filing Date:
January 29, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/3065; H01L21/683; H05H1/46
Domestic Patent References:
| JP2013533609A | 2013-08-22 | |||
| JP2013026387A | 2013-02-04 | |||
| JP2011009351A | 2011-01-13 | |||
| JP2010135851A | 2010-06-17 | |||
| JP2006257495A | 2006-09-28 | |||
| JP2004055779A | 2004-02-19 | |||
| JPH0718438A | 1995-01-20 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashioka
Teppei Omori
Yoshiki Kuroki
Junji Kashioka
Teppei Omori