To provide a movable element composed by reducing voltage/power consumption to an extent allowing itself to be formed integrally with a low voltage/low power consumption-based element; to provide a module with the movable element incorporated therein; and to provide an electronic apparatus.
This movable element is provided, on a semiconductor substrate 10, with: a signal line 11 for transmitting a signal; a connection/disconnection means 12 for mechanically connecting and disconnecting the signal line 11; switching means 13 each composed by including either of a thermal actuator or a piezoelectric actuator for switching the connection/disconnection means 12; and a holding means 14 formed of a material having latching capability for holding a state after the switching of the connection/disconnection means 12. By selecting such a circuit configuration, the reduction of voltage and the reduction of power consumption to an extent allowing itself to endure practical use can be reconciled with each other.
