To provide a movable element composed by reducing voltage/power consumption to an extent allowing itself to be formed integrally with a low voltage/low power consumption-based element; to provide a module with the movable element incorporated therein; and to provide an electronic apparatus.
This movable element is provided, on a semiconductor substrate 10, with: a signal line 11 for transmitting a signal; a connection/disconnection means 12 for mechanically connecting and disconnecting the signal line 11; switching means 13 each composed by including either of a thermal actuator or a piezoelectric actuator for switching the connection/disconnection means 12; and a holding means 14 formed of a material having latching capability for holding a state after the switching of the connection/disconnection means 12. By selecting such a circuit configuration, the reduction of voltage and the reduction of power consumption to an extent allowing itself to endure practical use can be reconciled with each other.
JPH10162713A | 1998-06-19 | |||
JP2004538507A | 2004-12-24 | |||
JP2004328561A | 2004-11-18 | |||
JP2005142982A | 2005-06-02 | |||
JP2003315701A | 2003-11-06 |
WO2003020633A1 | 2003-03-13 |
Yasushi Santanzaki