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Title:
MOVABLE ELEMENT, MODULE WITH THE SAME INCORPORATED THEREIN AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2006351297
Kind Code:
A
Abstract:

To provide a movable element composed by reducing voltage/power consumption to an extent allowing itself to be formed integrally with a low voltage/low power consumption-based element; to provide a module with the movable element incorporated therein; and to provide an electronic apparatus.

This movable element is provided, on a semiconductor substrate 10, with: a signal line 11 for transmitting a signal; a connection/disconnection means 12 for mechanically connecting and disconnecting the signal line 11; switching means 13 each composed by including either of a thermal actuator or a piezoelectric actuator for switching the connection/disconnection means 12; and a holding means 14 formed of a material having latching capability for holding a state after the switching of the connection/disconnection means 12. By selecting such a circuit configuration, the reduction of voltage and the reduction of power consumption to an extent allowing itself to endure practical use can be reconciled with each other.


Inventors:
AKIBA AKIRA
Application Number:
JP2005174264A
Publication Date:
December 28, 2006
Filing Date:
June 14, 2005
Export Citation:
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Assignee:
SONY CORP
International Classes:
H01H61/00; B81B3/00; H01H1/26; H01H37/52; H01H57/00; H02N2/00
Domestic Patent References:
JPH10162713A1998-06-19
JP2004538507A2004-12-24
JP2004328561A2004-11-18
JP2005142982A2005-06-02
JP2003315701A2003-11-06
Foreign References:
WO2003020633A12003-03-13
Attorney, Agent or Firm:
Yoichiro Fujishima
Yasushi Santanzaki