PURPOSE: To lower the position of the center of gravity of a stage and improve dynamic traveling accuracy by providing driving devices in parallel on a surface table and providing an operating device which moves a table along a movable guide.

CONSTITUTION: Linear motors 21 which constitute driving devices 2 are installed in parallel on a fixing guides 11 which are fixed on the opposite edges of a surface table 1. A pneumatic bearing 23 whose air jet port is opened to the opposite surfaces of the fixing guide 11 and the surface table 1, is installed in the movable body 22 of each of both linear motors 21. A movable guide 3 is provided between both pneumatic bearings 23, and a table 4 is supported by this movable guide 3, while an operating device 5 which makes the table 4 travel, is provided between the guide 3 and the table 4. The linear motor 51 of the operating device 5 forms part of the movable guide 3, while its movable body 52 is installed in the table 4.