PURPOSE: To automatically measure MTF of an X-ray and light conversion optical system, regarding MTF measurement.
CONSTITUTION: This device has an X-ray source 1, an X-ray and light conversion optical system 2 as a measurement object, an X-ray optical system comprising a variable slit 3 and a photocell 4, a stage 5 with the variable slit 3 and the photocell 4 mounted thereon, a differentiating circuit 19 for a detected signal, a Fourier conversion circuit 18, and a CPU 17 to calculate the magnifying power of the X-ray optical system, the scan rate of a screen 6 and the slit width of the variable slit 3. In this case, the magnifying power is calculated, and the slit width is adjusted to a value equal to or less than 1/2 of inspection resolution, using the result of the calculation. Furthermore, the screen 6 is inserted between the X-ray source 1 and the X-ray and light conversion optical system 2, and scanned at the prescribed speed. The image of the screen 6 so detected is differentiated and subjected to Fourier conversion, thereby measuring MTF of the concerned X-ray and light conversion optical system.
SUZUKI SHINJI
NISHIYAMA YOJI
GOTO YOSHIAKI
