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Title:
マルチベーンスロットルバルブ
Document Type and Number:
Japanese Patent JP6377251
Kind Code:
B2
Abstract:
A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.

Inventors:
Xin Feng
Application Number:
JP2017508551A
Publication Date:
August 22, 2018
Filing Date:
August 14, 2014
Export Citation:
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Assignee:
Ferrotec (USA) Corporation
International Classes:
F16K1/22; F16K51/02
Domestic Patent References:
JP2014092113A
JP2013083285A
Foreign References:
WO2013012880A1
WO2010087056A1
US3452762
Attorney, Agent or Firm:
Nagoya International Patent Service Corporation



 
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