Title:
マルチブレード、加工方法
Document Type and Number:
Japanese Patent JP6971093
Kind Code:
B2
Abstract:
A multi blade that processes semiconductor packages into a desired shape while dividing a package substrate includes plural cutting blades that divide the package substrate into the individual semiconductor packages and a spacer provided between two cutting blades adjacent to each other, and is configured in such a manner that the cutting blades and the spacer have the same rotation axis center. The outer surface of the spacer is formed into a transfer shape of the semiconductor package and is covered by an abrasive grain layer, and the upper surface of the package substrate is ground by the outer surface of the spacer simultaneously with cutting of the package substrate by the plural cutting blades.
Inventors:
Zhang
Kim Young Suk
Takahiro Ishii
Maki Sakai
Kim Young Suk
Takahiro Ishii
Maki Sakai
Application Number:
JP2017165963A
Publication Date:
November 24, 2021
Filing Date:
August 30, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24D5/12
Domestic Patent References:
| JP2000311872A | ||||
| JP2000357672A | ||||
| JP201518965A |
Foreign References:
| US6306018 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki
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