Title:
MULTI-CHAMBER PROCESS DEVICE
Document Type and Number:
Japanese Patent JPH065688
Kind Code:
A
Abstract:
PURPOSE: To obtain a multi-chamber processing device which sorts and arrange wafers subjected to different processes on a recover cassette side.
CONSTITUTION: A wafer transfer arm 11 is determined in a wafer W transfer route so as to enable a wafer to be selectively subjected to a specific treatment process depending on the housing station of a feed cassette 21. Wafer W treated through the chambers are selectively housed in different housing regions demarcated in a recovery cassette 22 corresponding to different treatments.
Inventors:
SUGANO YUKIYASU
Application Number:
JP16328392A
Publication Date:
January 14, 1994
Filing Date:
June 23, 1992
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Fujiya Shiga (1 person outside)
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