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Title:
MULTI-CHAMBER TYPE HEAT PROCESSING FURNACE
Document Type and Number:
Japanese Patent JP3490791
Kind Code:
B2
Abstract:

PURPOSE: To increase an efficiency of utilization of composing substances of a heat processing furnace and further to enable multi-kinds and low amount of production to be carried out by a method wherein a plurality of processing chambers and front chambers are connected and arranged side by side in a replaceable manner to each of connecting ports arranged to be contacted at their circumferences to the same cylindrical surface which is coaxial with a vertical rotating shaft in respect to a main transferring chamber.
CONSTITUTION: Material to be processed is loaded or unloaded through a vacuum purging chamber 1, purged in vacuum and its pressure is recovered with nitrogen gas and then the material is fed into a main transporting chamber 2. A main transporting means 3 of the main transporting chamber 2 can be rotated within a horizontal plane, can be stopped at an opposing position against each of the optional chambers around it (for example, a burn-off chamber 4, vacuum sintering chambers 5, 6 and a cooling chamber 7) and further can transport the processed material from any optional chamber to another optional chamber. Accordingly, a plurality of different processings can be performed concurrently in parallel from each other in response to the case and at the same time a plurality of processing chambers 4 to 7 can be continuously applied for processing in a time-series manner. With such an arrangement as above, an efficiency of utilization of the composing segments of the device can be increased and then multi-kinds and low amount production can be carried out.


Inventors:
Maruido Shigeki
Hirofumi Hashimoto
Harumi Yamada
Shuichi Maeda
Application Number:
JP34078494A
Publication Date:
January 26, 2004
Filing Date:
December 20, 1994
Export Citation:
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Assignee:
Koyo Thermo Systems Co., Ltd.
International Classes:
F27B5/02; F27B5/04; F27B5/12; (IPC1-7): F27B5/02; F27B5/04; F27B5/12
Domestic Patent References:
JP6244124A
Attorney, Agent or Firm:
Takafumi Watanabe