To prevent a heat treatment object from being cooled when it is transferred among heat treatment chambers, and to prevent the contamination of a transferring environment in a multi-chamber type heat treatment device.
The multi-chamber type heat treatment device has a transferring device 5 for transferring the heat treatment object X among a plurality of the heat treatment chambers, the transferring device 5 has a heat retaining means for retaining the heat of the heated heat treatment object X in the heat treatment chamber, and the heat retaining means has a heat insulating chamber 5h surrounding the heat treatment object X received in the transferring device 5, and a heater 5i disposed in the heat insulating chamber 5h.
COPYRIGHT: (C)2011,JPO&INPIT
JP2008170116A | 2008-07-24 | |||
JP2006063363A | 2006-03-09 | |||
JPH0586416A | 1993-04-06 | |||
JP2005009702A | 2005-01-13 |
Takashi Watanabe
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