To provide a multi-color X-ray measuring apparatus and method which are capable of simultaneously detecting a plurality of monochromatic X-rays of different wavelengths included in multi-color X-rays and obtaining the intensity or the ratio of the plurality of detected monochromatic X-rays included in the multi-color X-rays in a state where a plurality of photons are made incident simultaneously in time.
The multi-color X-ray measuring apparatus is provided with a first X-ray detector 12 on the upstream side, a second X-ray detector 14 on the downstream side and an arithmetic device 20. The two X-ray detectors 12 and 14 are laminated with each other so that multi-color X-rays (two kinds of monochromatic X-rays 1a and 2a) successively and simultaneously pass therethrough. By the arithmetic device 20, from the detection efficiencies G11, G21, G12 and G22 of the respective X-ray detectors for the monochromatic X-rays of the respective wavelengths λ1 and λ2, transmission efficiencies A12 and A22 until the monochromatic X-rays of the respective wavelengths λ1 and λ2 are made incident on the second X-ray detector 14 and the detection strengths V1 and V2 of the respective X-ray detectors, the respective intensities I1 and I2 or the ratio of the two kinds of monochromatic X-rays 1a and 2a made incident on the first X-ray detector 12 is computed.
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Yasuharu Nakasone
Toshihiro Nomura