Title:
マルチ電子ビーム画像取得装置及びマルチ電子ビーム画像取得方法
Document Type and Number:
Japanese Patent JP7234052
Kind Code:
B2
Abstract:
A beam arrangement portion is provided to arrange multiple primary electron beams on a substrate. The beam arrangement portion arranges the multiple primary electron beams in a square lattice along a first moving direction of a stage allowing the substrate to be placed thereon and a second moving direction perpendicular to the first moving direction in a state where, when the multiple primary electron beams are viewed as a whole, beams around four corners of the square lattice are omitted.
Inventors:
Noh long work
Application Number:
JP2019121985A
Publication Date:
March 07, 2023
Filing Date:
June 28, 2019
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01J37/09; G03F1/86; G03F7/20; H01J37/28; H01L21/66
Domestic Patent References:
| JP2018037579A |
Foreign References:
| US20180254167 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Nakamura Yukitaka
Satoru Asakura
Takeshi Sekine
Akira Akaoka
Takeyuki Suzuki
Nakamura Yukitaka
Satoru Asakura
Takeshi Sekine
Akira Akaoka
Takeyuki Suzuki