Title:
MULTI-ELECTRON GUNS FOR ELECTRON BEAM WORKING APPARATUS
Document Type and Number:
Japanese Patent JPS5357599
Kind Code:
A
Abstract:
PURPOSE: To provide a plurality of electron beam producing means which produce electron beams radiating generally parallel each other to one aparture, to enable controlling of electron beam strength by individual control of the electron beams.
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Inventors:
YASUDA HIROSHI
TSUCHIKAWA HARUO
NAKAMURA MORITAKA
TSUCHIKAWA HARUO
NAKAMURA MORITAKA
Application Number:
JP13265076A
Publication Date:
May 24, 1978
Filing Date:
November 04, 1976
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01J37/06; H01J37/30; (IPC1-7): H01J37/30