Title:
MULTI-LAYER ACTUATOR ELECTRODE CONFIGURATION FOR IMPROVED RESONANCE
Document Type and Number:
Japanese Patent JP2023113601
Kind Code:
A
Abstract:
To provide a multi-layer actuator configuration to reduce out-of-plane motion and obtain good performance characteristics.SOLUTION: A multi-layer microactuator (PZT) 14 includes first to third active piezoelectric layers 131 to 133. The first active piezoelectric layer has a top surface and a bottom surface. The second active piezoelectric layer has a top surface and a bottom surface on the top surface of the first active piezoelectric layer. The third active piezoelectric layer has a top surface and a bottom surface on the top surface of the second active piezoelectric layer. The first and second active piezoelectric layers define a first effective electrode length 131D, and similarly the second and third active piezoelectric layers define a second effective electrode length 131D that is longer than the first effective electrode length.SELECTED DRAWING: Figure 4
Inventors:
LONG QIAN
EE KUEN CHEE
DAVID GLAESS
PREECHA SUDACHUN
EKARATCH PANKAEW
EE KUEN CHEE
DAVID GLAESS
PREECHA SUDACHUN
EKARATCH PANKAEW
Application Number:
JP2023067756A
Publication Date:
August 16, 2023
Filing Date:
April 18, 2023
Export Citation:
Assignee:
MAGNECOMP CORP
International Classes:
H10N30/87; G11B21/10; G11B21/21; H10N30/067; H10N30/20; H10N30/50
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda
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