Title:
シールを行うためのマルチノード複数回使用Ｏリングおよび方法
Document Type and Number:
Japanese Patent JP7456993
Kind Code:
B2
Abstract:
A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.
Inventors:
Maheshwari Shagun Pankaj
Yang Yao-hun
Lee King Fai
You Andrew Wen Wei
Pal Aniruddha
Cho Tom Kay
Liao Chen-Ming
Yang Yao-hun
Lee King Fai
You Andrew Wen Wei
Pal Aniruddha
Cho Tom Kay
Liao Chen-Ming
Application Number:
JP2021502757A
Publication Date:
March 27, 2024
Filing Date:
June 19, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/683; F16J15/10
Domestic Patent References:
| JP2014237786A | ||||
| JP2003172452A | ||||
| JP2002130481A |
Foreign References:
| US20060220326 |
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Nobuhiko Suzuki
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Nobuhiko Suzuki