Title:
複数ポケットの電子ビーム源
Document Type and Number:
Japanese Patent JP4845286
Kind Code:
B2
Abstract:
A multiple pocket vapour source (105), the vapour produced by an electron beam (205) that can be directed to uncovered crucible pockets, comprising:
a) a crucible (301) having a crucible surface, the surface having a plurality of pockets (201) for holding coating materials to be evaporative heated; and
b) a crucible cover (209) with a covering surface facing the crucible (301), where the pockets are uncovered by lifting the crucible cover away from the crucible prior to rotation of the crucible.
Inventors:
Bruce Gee Ramsey
Application Number:
JP2001167138A
Publication Date:
December 28, 2011
Filing Date:
June 01, 2001
Export Citation:
Assignee:
Ferrotec (USA) Corporation
International Classes:
C23C14/24; C23C14/30; F27B5/05; F27B5/06
Domestic Patent References:
| JP61183461A | ||||
| JP2019459A |
Foreign References:
| US4944245 | ||||
| US4983806 |
Attorney, Agent or Firm:
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Hiroko Suzuki
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Hiroko Suzuki