Title:
【発明の名称】多環式共重合体組成物
Document Type and Number:
Japanese Patent JP2002519487
Kind Code:
A
Abstract:
Copolymers containing repeating units polymerized from at least one polycyclic monomer and at least one acrylic monomer are disclosed. The copolymer is formed by addition polymerization in the presence of a Group VIII transition metal catalyst. The copolymers contain hydrocarbyl and/or functional substituents pendant from the polymer backbone. In one embodiment the copolymer contains pendant ester substituents containing acid labile groups. The copolymers are useful as resist materials that are sensitive to imaging radiation.
Inventors:
Brian El Goodall
Lester H. Macintosh, The Third
Lester H. Macintosh, The Third
Application Number:
JP2000558145A
Publication Date:
July 02, 2002
Filing Date:
June 18, 1999
Export Citation:
Assignee:
The B.F.Goodrich Company
International Classes:
C08F220/00; C08F232/00; C08F232/08; G03F7/039; (IPC1-7): C08F232/08; C08F220/00; G03F7/039
Attorney, Agent or Firm:
Masataka Oshima