Title:
MULTI-STAGE TYPE VACUUM PUMP
Document Type and Number:
Japanese Patent JP3767052
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent drop of the exhaust speed and suppress increase of the driving force by improving the degree of vacuum of the back pressure of each single stage pump using a low-cost system.
SOLUTION: The suction port and exhaust port of adjoining single stage pumps 1-4 are connected through exhaust pipe 23/25 so that a plurality of single stage pumps 1-4 coupled in series, and motors 5-8 drive the pumps 1-4, respectively, and driving means 9-12 change the revolving speeds of the pumps 1-4. The pump 4 in contact with the atmospheric side is given a large capacity.
Inventors:
Atsushi Miura
Yuya Taniguchi
Yuya Taniguchi
Application Number:
JP33492496A
Publication Date:
April 19, 2006
Filing Date:
November 30, 1996
Export Citation:
Assignee:
Aisin Seiki Co., Ltd.
International Classes:
F04C23/00; F04B37/14; F04B41/06; F04B49/06; F04C25/02; (IPC1-7): F04C23/00; F04B49/06; F04C25/02
Domestic Patent References:
| JP7305689A | ||||
| JP8254193A | ||||
| JP5044643A | ||||
| JP7270004A | ||||
| JP8100778A | ||||
| JP3504529A |
Attorney, Agent or Firm:
▲高▼橋 克彦