Title:
多波長干渉変位測定方法及び装置
Document Type and Number:
Japanese Patent JP5511162
Kind Code:
B2
Abstract:
When the distance from the body of an interferometer to an object (110) or a displacement is interferometrically measured by using laser beams of a plurality of wavelengths, obtaining interference measurement values that are measured at the respective wavelengths, and expanding a measurement range by a synthetic wavelength that is equivalently longer than the wavelengths of the laser beams from combinations of the wavelengths, the wavelengths of the laser beams are measured by using an optical comb generator (104). An interferometric measurement may be performed while the oscillation wavelength of a variable wavelength laser (101) is measured by using the optical comb, and a feedback control is performed, whereby laser beams of a plurality of predetermined wavelengths are obtained; a variable wavelength laser is caused to oscillate at an arbitrary wavelength to obtain interference measurement values at the plurality of wavelengths, and wavelengths (frequencies) of laser beams at timings when the respective interference measurement values are obtained are measured by the optical comb; or a plurality of lasers (416,417) are used, and wavelengths of laser beams oscillated from the lasers are measured by the optical comb.
Inventors:
川▲崎▼ 和彦
Application Number:
JP2008198185A
Publication Date:
June 04, 2014
Filing Date:
July 31, 2008
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B9/02; G01B11/00; G01J9/02
Domestic Patent References:
| JP4299203A | ||||
| JP2553276B2 | ||||
| JP2008051674A | ||||
| JP2007333428A | ||||
| JP2004340690A | ||||
| JP2009198477A | ||||
| JP2007040994A |
Other References:
Jonghan Jin, Young-Jin Kim, Yunseok Kim and Seung-Woo Kim,"Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser",OPTICS EXPRESS,2006年 6月26日,Vol.14, No.13,pages 5968-5974
Nicolas Schuler, Yves Salvade, Samuel Leveque, Rene Dandliker, Ronald Holzwarth,"Frequency-comb-referenced two-wavelength source for absolute distance measurement",OPTICS LETTERS,2006年11月,Vol.31, No.21,pages 3101-3103
Mikko Merimma, K. Nyholm, M. Vainio, Antti Lassila,"Traceability of Laser Frequency Calibrations at MIKES",IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2007年 4月,Vol.56, No.2,pages 500-504
Youichi Bitou, Thomas R. Schibli, Kaoru Minoshima,"Accurate wide-range displacement measurement using tunable diode laser and optical frequency comb generator",OPTICS EXPRESS,2006年 1月,Vol.14, No.2,pages 644-654
Yves Salvade, Nicolas Schuler, Samuel Leveque, Sebastien Le Floch,"High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source",APPLIED OPTICS,2008年 5月10日,Vol.47, No.14,pages 2715-2720
Nicolas Schuler, Yves Salvade, Samuel Leveque, Rene Dandliker, Ronald Holzwarth,"Frequency-comb-referenced two-wavelength source for absolute distance measurement",OPTICS LETTERS,2006年11月,Vol.31, No.21,pages 3101-3103
Mikko Merimma, K. Nyholm, M. Vainio, Antti Lassila,"Traceability of Laser Frequency Calibrations at MIKES",IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2007年 4月,Vol.56, No.2,pages 500-504
Youichi Bitou, Thomas R. Schibli, Kaoru Minoshima,"Accurate wide-range displacement measurement using tunable diode laser and optical frequency comb generator",OPTICS EXPRESS,2006年 1月,Vol.14, No.2,pages 644-654
Yves Salvade, Nicolas Schuler, Samuel Leveque, Sebastien Le Floch,"High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source",APPLIED OPTICS,2008年 5月10日,Vol.47, No.14,pages 2715-2720
Attorney, Agent or Firm:
Satoshi Takaya
Keisuke Matsuyama
Tsuyoshi Makino
Keisuke Matsuyama
Tsuyoshi Makino
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