Title:
マルチワイヤソー
Document Type and Number:
Japanese Patent JP4387361
Kind Code:
B2
Abstract:
A multi-wire saw for cutting a workpiece (3) while supplying a slurry (7) containing abrasive grains to a wire (5) traveling between a plurality of rollers (24,27),
whereby a slurry supply mechanism (8E,8F) having a holding portion (53,53A) for holding the slurry (7) and a temperature control mechanism for keeping the temperature of the slurry (7) constant and adapted to supply the slurry (7) to the wire (5) as the wire (5) passes through the holding portion (53,53A) are provided on an upstream side of a site where the workpiece (3) is cut;
and a surface (56a,56b,56c) constituting the holding portion (53,53A) is provided with a passage hole (57a,57b,57c) allowing the wire (5) to pass therethrough.
Inventors:
Takafumi Kawasaki
Meizo Tsuruta
Hirokazu Nishida
Seiichi Mimura
Masayuki Hamaho
Naofumi Tominaga
Meizo Tsuruta
Hirokazu Nishida
Seiichi Mimura
Masayuki Hamaho
Naofumi Tominaga
Application Number:
JP2005514977A
Publication Date:
December 16, 2009
Filing Date:
October 22, 2004
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
B24B27/06; B24B57/02; B28D5/00; B28D5/04; H01L21/304
Domestic Patent References:
| JP1316164A | ||||
| JP2262955A | ||||
| JP61284926A | ||||
| JP11320379A | ||||
| JP10180750A | ||||
| JP2001079747A |
Attorney, Agent or Firm:
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order