PURPOSE: To provide a multichamber treatment system conveyer whose loader chambers and a conveyer arm can be used as common components while a transfer chamber only is replaced when the number of vacuum treatment chambers provided around the vacuum treatment chamber is changed and which is easy to manufacture and easy to assemble.
CONSTITUTION: A polygonal transfer chamber 11 with which three vacuum treatment chambers P1-P3 are communicated through gate valves G1, two loader chambers 12 and 13 which are linked with the transfer chamber 11 through gate valves G2 and a conveyer arm 14 which is provided in the transfer chamber 11 so as to be able to rotate and stretch and contract and which transfers wafers W between the loader chambers 12 and 13 and the vacuum treatment chambers P1-P3 are provided. Although the shape and size of the transfer chamber 11 are changed in accordance with the number of the vacuum treatment chambers provided around the transfer chamber 11, the connection parts 11f and 11g between the transfer chamber 11 and the loader chambers 12 and 13 are not changed. The conveyer arm 14 has a minimum revolving radius R which allows the conveyer arm 14 to revolve in the smallest transfer chamber 11 and has a maximum arm stretching length which allows the conveyer arm 14 to convey the wafers W from the largest transfer chamber 11 to the vacuum treatment chamber.
SAEKI HIROAKI
IIZUKA YOJI
