Title:
多層膜の膜厚測定装置
Document Type and Number:
Japanese Patent JP4911437
Kind Code:
B2
Abstract:
There is provided a method of measuring a physical thickness of each of layers of a multilayer film, based on an optical thickness thereof. The method includes: (a) setting refractive indexes of the layers; (b) calculating a coefficient matrix using the refractive indexes; (c) providing light to the multilayer film so as to measure the optical thickness based on the light reflected by the multilayer film; and (d) calculating the physical thickness, based on the optical thickness and the coefficient matrix.
Inventors:
Kazushi Nishida
Application Number:
JP2009250260A
Publication Date:
April 04, 2012
Filing Date:
October 30, 2009
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01B11/06
Domestic Patent References:
| JP2008292473A | ||||
| JP2005308394A | ||||
| JP2009092454A |