Title:
MULTILAYER STRUCTURE AND CLEANING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2007027329
Kind Code:
A
Abstract:
To solve the problem, wherein it is difficult to provide a large ceramics member rapidly and economically.
A multilayer structure is composed by film-forming a ceramics film on a base material formed by a material that can be manufactured relatively easily. The ceramics film is film-formed by plasma flame spraying, CVD, PVD, or a sol/gel method, or the like, or a method in combination with a flame spraying film.
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Inventors:
OMI TADAHIRO
TERAMOTO AKINOBU
MORINAGA HITOSHI
KISHI YUKIO
OTAKI HIROMICHI
TSUTAI YOSHIFUMI
TERAMOTO AKINOBU
MORINAGA HITOSHI
KISHI YUKIO
OTAKI HIROMICHI
TSUTAI YOSHIFUMI
Application Number:
JP2005206071A
Publication Date:
February 01, 2007
Filing Date:
July 14, 2005
Export Citation:
Assignee:
UNIV TOHOKU
NIHON CERATEC CO LTD
NIHON CERATEC CO LTD
International Classes:
H01L21/3065; B08B3/08; B08B3/12; C04B41/87; C23C4/10; C23C14/08; C23C16/40; H05H1/46
Domestic Patent References:
| JPH11265871A | 1999-09-28 | |||
| JPH1064868A | 1998-03-06 | |||
| JP2002261062A | 2002-09-13 | |||
| JP2005150768A | 2005-06-09 | |||
| JP2003112997A | 2003-04-18 | |||
| JP2004523649A | 2004-08-05 |
Foreign References:
| WO2004003962A2 | 2004-01-08 |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda