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Patent Searching and Data


Title:
MULTILAYER STRUCTURE AND CLEANING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2007027329
Kind Code:
A
Abstract:

To solve the problem, wherein it is difficult to provide a large ceramics member rapidly and economically.

A multilayer structure is composed by film-forming a ceramics film on a base material formed by a material that can be manufactured relatively easily. The ceramics film is film-formed by plasma flame spraying, CVD, PVD, or a sol/gel method, or the like, or a method in combination with a flame spraying film.


Inventors:
Omi, Tadahiro
Teramoto, Akinobu
Morinaga, Hitoshi
Kishi, Yukio
Otaki, Hiromichi
Tsutai, Yoshifumi
Application Number:
JP2005000206071
Publication Date:
February 01, 2007
Filing Date:
July 14, 2005
Export Citation:
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Assignee:
TOHOKU UNIV
NIHON CERATEC CO LTD
International Classes:
H01L21/3065; B08B3/08; B08B3/12; C04B41/87; C23C4/10; C23C14/08; C23C16/40; H05H1/46
Domestic Patent References:
JPH11265871A1999-09-28
JPH1064868A1998-03-06
JP2002261062A2002-09-13
JP2005150768A2005-06-09
JP2003112997A2003-04-18
JP2004523649A2004-08-05
Foreign References:
WO2004003962A22004-01-08
Attorney, Agent or Firm:
池田 憲保
福田 修一