To provide a multilayer structure and its manufacturing method capable of stably manufacturing at simple process.
On a substrate 1, the multilayer structure comprises a surface layer 3 wherein at least one atom layer of alkaline metal atom is laminated via a buried layer 2 wherein at least one atom layer of alkaline metal atom on the substrate is substituted, and its work function ϕ is set at 3 eV or less. As an alkaline metal atom, Rb can be used, and as the metal substrate 1, Cu, Ni or those alloys can be applied. After forming an adhesive layer where the compound particles of alkaline metal atom is finely dispersed on the metal substrate 1, the multilayer structure can be manufactured by irradiating high energy beam at this adhesion layer.
COPYRIGHT: (C)2007,JPO&INPIT
MAKINO TAKEHIKO
TAKIOTO ATSUSHI
AKAHORI MITSURU
NAGOYA INST TECHNOLOGY
| JP2005228933A | 2005-08-25 | |||
| JP2004134229A | 2004-04-30 |
| WO2005001871A2 | 2005-01-06 |
Fumio Yamamoto
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