To provide a method for manufacturing a piezoelectric substrate laminate for a multilayer ultrasonic transducer with an improved vibration feature and wide-band high sensitivity.
In a first piezoelectric substrate, a first groove is provided on an upper surface, a second groove is provided on a lower surface, and an electrode layer is formed while being separated into a first electrode and a second electrode. On a second piezoelectric substrate, a third groove is provided on an upper surface, a polished part is provided at an edge, and an electrode layer is formed while being separated into a third electrode and a fourth electrode. The first piezoelectric substrate and the second piezoelectric substrate are laminated so as to confront the second groove of the first piezoelectric substrate and the third groove of the second piezoelectric substrate, the first electrode and the fourth electrode are formed into a first electrode node 42, and the second electrode and the third electrode are formed into a second electrode node 44. The second groove is formed wider than the first groove and as wide as the third groove.
JUNG HO
| JP2003061193A | 2003-02-28 | |||
| JPS6477298A | 1989-03-23 |
| US20030107303A1 | 2003-06-12 |
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
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