To provide a multilayer wiring substrate in which a surface flatness is good and which is excellent in electric characteristic and conduction reliability.
In the multilayer wiring substrate, a resin insulating layer 4 and a wiring conductor layer 5 are alternately laminated on the wiring board 1 having a conductor layer 3 on a top surface. The multilayer wiring substrate connects the wiring conductor layer 5 and the conductor layer 3 electrically via a through-conductor 6 in the resin insulating layer 4 between the wiring conductor layer 5 located up and the conductor layer 3 located down. The wiring board 1 is constituted of an insulating substrate 2, a resin coating layer 10 having a through-hole and stuck directly on the substrate 2, and the conductor layer 3 provided so as to bury the through-hole. The conductor layer 3 is composed of a main conductor, and a ground conductor with the coefficient of thermal expansion smaller than the main conductor covering continuously the side face and the bottom.
JPH0383398A | 1991-04-09 | |||
JPH06505833A | 1994-06-30 | |||
JPH0653332A | 1994-02-25 | |||
JP2004327715A | 2004-11-18 | |||
JPH06112630A | 1994-04-22 | |||
JPH036893A | 1991-01-14 | |||
JP2002246744A | 2002-08-30 | |||
JPH03297191A | 1991-12-27 |
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