Title:
複数の化学物質メッキシステム
Document Type and Number:
Japanese Patent JP2007525591
Kind Code:
A
Inventors:
Ellanger, Russell, Sea.
Yang, Michael, X.
Shi, Min
Bricher, Eric, Bee.
Donoso, Bernard
Bread, lily, ell.
Sherman, Svetlana
Ho, Henry
Nguyen, Ann, N.
Learner, Alexander, N.
Dambra, Allen, Elle.
Shanmugasundrum, Arlukmer
Ishikawa Tetsuya
Rabinovich, Jevgeny
Le Bomilsky, Dormitory
Mock, Yuk-Phi, Edwin
Guyan, Song, Tee.
Yang, Michael, X.
Shi, Min
Bricher, Eric, Bee.
Donoso, Bernard
Bread, lily, ell.
Sherman, Svetlana
Ho, Henry
Nguyen, Ann, N.
Learner, Alexander, N.
Dambra, Allen, Elle.
Shanmugasundrum, Arlukmer
Ishikawa Tetsuya
Rabinovich, Jevgeny
Le Bomilsky, Dormitory
Mock, Yuk-Phi, Edwin
Guyan, Song, Tee.
Application Number:
JP2006513120A
Publication Date:
September 06, 2007
Filing Date:
April 16, 2004
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C25D19/00; B08B3/02; C25D5/00; C25D7/12; C25D17/00; C25D21/00; C25D21/08; H01L21/00; H01L21/68; H01L21/687; H05K3/18; H01L21/683
Domestic Patent References:
| JPH09260338A | 1997-10-03 | |||
| JPH0414237A | 1992-01-20 | |||
| JPS62101045A | 1987-05-11 | |||
| JP2001068434A | 2001-03-16 | |||
| JP2000319797A | 2000-11-21 | |||
| JP2003027280A | 2003-01-29 | |||
| JP2001156032A | 2001-06-08 | |||
| JP2001102298A | 2001-04-13 | |||
| JP2002273360A | 2002-09-24 | |||
| JP2000084503A | 2000-03-28 | |||
| JP2003068830A | 2003-03-07 |
Foreign References:
| WO2002090623A1 | 2002-11-14 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Yuichi Yamada