PURPOSE: To facilitate the manufacture and the dimensional control of each part and reduce the dispersion of the performance by facing a stator to a circumferential flow impeller with a slit, and communicating, in series, circumferential flow pump flowing passages of each step formed at the recessed part on the internal steps so as to form them integrally.
CONSTITUTION: The gas intook from an inlet 11A enters into a ventilation flue 34 through an intake port, and when the gas is flowed into the spaces between impeller blades 33 of a circumferential flow impeller 30, the circumferential speed is given to the gas by the impellers 33 rotating in high speed and the gas is exhausted to the radial from the spaces between the blades 33 by the centrifugal force, and after it is decelerated in the ventilation flue 34 so as to recover the pressure, it enters again to the spaces between the impellers 33, drawing a vortex like that the arrow shows. The gas repeats this work several times during the passing through the ventilation flue 34, and is flowed in the ventilation flue 34 in the spiral screw shape so as to obtain the enough energy from the circumferential flow impeller 30. Consequently, the high compression ratio can be generated.
| JPS6229797 | TURBO MOLECULE PUMP |
| JP4660967 | Turbo molecular pump |
SAKAGAMI SEIJI
OKAWADA TAKESHI
UEDA SHINJIRO
AWATA YOSHIHISA
NAGAOKA TAKASHI
| JPS61247893A | 1986-11-05 | |||
| JPS5157308U | 1976-05-06 |