Title:
MULTIPOLE COLD CATHODE IONIZATION GAUGE
Document Type and Number:
Japanese Patent JP2007024849
Kind Code:
A
Abstract:
To provide an ionization gauge that outgases a small amount of gas and has a robust cathode.
A hot cathode in a hot cathode ionization gauge (for example: hot cathode B-A type ionization gauge) is replaced by a cold cathode by a carbon nanotube. The drawing shows a vessel 1, a cathode 5 where the carbon nanotube is fixed to the inner surface of a metal cylinder, a drawing electrode 4 for promoting electron emission, a collecting electrode 3, an ion collecting electrode 2, and an introduction electrode 6.
More Like This:
JP2018036132 | COLD-CATHODE IONIZATION GAUGE |
WO/2006/094687 | VACUUM MEASURING GAUGE |
JP5249112 | Cold cathode ionization vacuum gauge and pressure measurement method |
Inventors:
IIJIMA YOSHIO
Application Number:
JP2005234972A
Publication Date:
February 01, 2007
Filing Date:
July 15, 2005
Export Citation:
Assignee:
TOYO DENSHI KENKYUSHO KK
International Classes:
G01L21/34
Previous Patent: METHOD AND DEVICE FOR DETECTING LEAKAGE OF MECHANICAL SEAL
Next Patent: EMBLEM TELLING SMELL OF FECES
Next Patent: EMBLEM TELLING SMELL OF FECES