Title:
MULTISTAGE SLIDE ARM DEVICE
Document Type and Number:
Japanese Patent JP3475120
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent scattering of dust (particle) into a clean room even if a multistage slide arm device consists of multiple stages by covering the openings of guide grooves with belts which serve also as movable belts.
SOLUTION: Arm-like frames 2, 3 stacked one on top of the other are moved by belt moving means 5, 6 along guide grooves 10, 11 formed in individual frames 2, 3, and the belts 58, 65 of the belt moving means 5, 6 always cover approximately the overall lengths of the guide grooves 10, 11 during movement of the frames, whereby scattering of dust can be prevented.
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Inventors:
Hiroshi Uno
Application Number:
JP12562199A
Publication Date:
December 08, 2003
Filing Date:
May 06, 1999
Export Citation:
Assignee:
Tatsumo Co., Ltd.
International Classes:
B65G1/04; B25J18/02; B25J19/00; (IPC1-7): B25J19/00; B25J18/02
Domestic Patent References:
| JP9193077A | ||||
| JP61502320A |
Attorney, Agent or Firm:
Yasuo Itaya
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