To increase a production-device installable area in a lower-layer clean room in a multistoried clean room.
The multistoried clean room is constituted in such a manner that a frame 17 as a vibration damping means is installed between the lower- layer clean room 11 and an upper-layer clean room 12 and the generation of the vibrations of the clean room 12 is damped and a central column 16 supporting the clean room 11 and the clean room 12 is arranged only in one row at the center of the clean room 11 and the clean room 12. Accordingly, since the production-device installable area in the clean room 11 is ensured, the degree of freedom of the layout of a production line is improved, and space efficiency in the multistoried clean room 10 is enhanced simultaneously while the clean room 10 can correspond to the augmentation of equipment.
SUZUKI TOSHIKAZU
KORIYAMA HIROHISA
