PURPOSE: To improve a degree of freedom and mass productivity in material selection and to miniaturize a vibration film unit in the manufacture of the vibration film unit for a microphone.

CONSTITUTION: The manufacture of the vibration film unit comprise a process to pierce a small hole 2 on each cross-section of a large substrate raw material divided into the small cross-sections, a process to form spacer parts 4 with prescribed thickness at the whole substrate raw material area at least the area enclosing the piercing area of the small hole of each cross-section, a process to form an integral electrode 6/back electrode 5 on the whole substrate raw material area by covering the piercing areas of the small holes 2 on both planes of a substrate and the inner circumferential plane of the small hole 2 with metallic film, a process to place a thermocompression bonding material 7 on the whole substrate raw material area on the substrate 1 at the outside of an inside spacer 4 and to place a vibration film material 8 extending over the whole substrate raw material area, a process to bond with pressure the vibration film material 8 on the substrate 1 by heating and pressing from the surface of the vibration film material 8, a process to cut excessive vibration film materials at the outside area from a bonding part and to connect a signal line 9 to the electrode 6, and a process to divide the substrate material into each cross-section.