Title:
【発明の名称】照明装置及び観察装置
Document Type and Number:
Japanese Patent JP3015213
Kind Code:
B2
Inventors:
Nobuto Kawahara
Osamu Konouchi
Osamu Konouchi
Application Number:
JP32191392A
Publication Date:
March 06, 2000
Filing Date:
December 01, 1992
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B9/04; G01B11/00; G01B11/24; G02B21/06; H01L21/60; H01L21/66; (IPC1-7): G01B11/00; G02B21/06
Domestic Patent References:
| JP4107986A | ||||
| JP5235595A |
Attorney, Agent or Firm:
Giichi Marushima