Title:
【発明の名称】プラズマエッチング方法
Document Type and Number:
Japanese Patent JP2564702
Kind Code:
B2
Inventors:
YAMAZAKI SHUNPEI
Application Number:
JP29100390A
Publication Date:
December 18, 1996
Filing Date:
October 29, 1990
Export Citation:
Assignee:
HANDOTAI ENERGY KENKYUSHO
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23F4/00; H01L21/3065
Domestic Patent References:
| JP52131470A | ||||
| JP52131939A | ||||
| JP5455174A | ||||
| JP5493360A | ||||
| JP55104484A |
Attorney, Agent or Firm:
Kyosuke Kato