CANTILEVER TYPE PROBE AND INFORMATION PROCESSOR AND INFORMATION PROCESSING METHOD USING THE SAME

Japanese Patent JP3060137

B2

PURPOSE: To prevent the generation of a cantilever at the time of a production process by providing a nonelectric conductor thin film on the upper or under face of a displacement element having a probe for inputting/outputting information at its free end.
CONSTITUTION: An electric conductor layer is provided on the upper face of a substrate 1 and patterned by photolithography to form an electrode 14. A piezoelectric substance 15' is then formed on the electrode 14 and is patterned. An electrode 13, a piezoelectric substance 15 and an electrode 12 are formed by a similar method. A metallic piece consisting of Pt, Ph, W, etc., is adhered to one end of the cantilever-shaped pattern to form the probe 17. The lower part of the pattern is removed by etching from the back of the substrate 1 and the nonelectric conductor thin film 18 is provided on the electrode 14 to form the cantilever type probe 11. The warpage of the cantilever generated at the time of the producting process is removed and is usable in a head for a recording and reproducing device.

Hiroshi Hirai
Osamu Takamatsu
Yuu Nakayama
Takayuki Yagi
Yuji Kasanuki
Keisuke Yamamoto
Yasuhiro Shimada
Yoshio Suzuki

JP35172491A

July 10, 2000

December 16, 1991

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Canon Inc

B81B3/00; G01N27/00; G01Q10/00; G01Q10/04; G01Q60/16; G01Q70/14; G01Q80/00; G11B9/00; G11B9/14; H01J37/28; H01L21/66; H01L41/09; H01L41/22; G01Q60/00; (IPC1-7): G11B9/14; G01N13/12; G12B21/20; H01L41/22

JP2122580A
JP5120742A
JP3504762A

【文献】国際公開89/7258(WO,A1)

Yoshio Toyota (1 outside)

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