Title:
WASHING DEVICE
Document Type and Number:
Japanese Patent JPH0515857
Kind Code:
A
Abstract:
PURPOSE: To provide the washing device which can improve the washing capacity to a work and prevents the state of contamination of washing members for washing the work.
CONSTITUTION: A washing liquid is supplied from a washing liquid supplying device 32 into a liquid pooling groove 23 of a rotating body 19 coated with a cover 14 via tubes 31a to 31d. A part of the washing liquid flows over an outside wall 22 and flows downward between this wall and the cover 14. The remaining washing liquid in the liquid pooling groove 23 falls via through holes 25a to 25d onto the work 12 and diffuses radically outward through the inside of a brush 15.
Inventors:
KITOU TSUNANORI
URABE TAKAYUKI
OKETANI HIROI
URABE TAKAYUKI
OKETANI HIROI
Application Number:
JP17397591A
Publication Date:
January 26, 1993
Filing Date:
July 15, 1991
Export Citation:
Assignee:
SHARP KK
International Classes:
H01L21/304; H05K3/26; B08B1/04; (IPC1-7): B08B1/04; H01L21/304; H05K3/26
Attorney, Agent or Firm:
Nishikyo Keiichiro (1 outside)
Next Patent: WORK WASHING DEVICE