Title:
【発明の名称】照明装置
Document Type and Number:
Japanese Patent JP2569648
Kind Code:
B2
Inventors:
Kazuhiro Takahashi
Application Number:
JP31389887A
Publication Date:
January 08, 1997
Filing Date:
December 11, 1987
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F9/00; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F9/00
Domestic Patent References:
| JP5785019A |
Foreign References:
| US1688619A |
Attorney, Agent or Firm:
Takanashi Yukio