Title:
CONSTANT TEMPERATURE UNIT
Document Type and Number:
Japanese Patent JPH0651019
Kind Code:
A
Abstract:
PURPOSE: To shorten the time of attaining the set temp. of a product from the initial temp. in a constant temp. unit. configuring the unit small, and stabilize the set temp. of the product.
CONSTITUTION: A constannt temp. unit 2 to heat or cool a product 5 is equipped with a heat conducting block 20 which comes in direct contact with the product 5. The block 20 is furnished with a heating means 22 to heat it and a cooling means 21 to cool the same 20.
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Inventors:
KIMURA SHINICHI
Application Number:
JP28763491A
Publication Date:
February 25, 1994
Filing Date:
November 01, 1991
Export Citation:
Assignee:
HITACHI LTD
AKITA DENSHI KK
AKITA DENSHI KK
International Classes:
G01R31/26; H01L21/324; H01L21/66; F28F27/00; (IPC1-7): G01R31/26; F28F27/00; H01L21/324; H01L21/66
Attorney, Agent or Firm:
Akita Aki
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