Title:
PARTICLE DETECTING DEVICE
Document Type and Number:
Japanese Patent JP2529661
Kind Code:
B2
Abstract:
PURPOSE: To provide a particle detecting device that can stably measure particles regardless of the kind of gas used in a vacuum chamber and its processing temperature and allows easy installation in a semiconductor manufacturing device and easy maintenance.
CONSTITUTION: A particle detecting device includes a small detecting vacuum chamber 4 having laser-beam transmitting windows 5, 6 and a scattered-light takeout window 10; a laser diode 1 provided in an atmospheric environment outside the detecting vacuum chamber 4 and giving off a laser beam 2 into the vacuum chamber 4 through the laser-beam transmitting windows 5, 6; and a particle detector 14 which includes a photosensor 12 that detects light 9 scattered inside the vacuum chamber 4 and taken in through the scattered-light takeout window 10. The detecting vacuum chamber 4 is designed to be freely mounted in and removed from a vacuum chamber. The particle detector 14 is formed as a single unit, mounted in the detecting vacuum chamber 4 from outside the detecting vacuum chamber 4, and designed to be freely mounted in and removed from the detecting vacuum chamber 4.
Inventors:
Miyashita, Haruzo
Application Number:
JP22833293A
Publication Date:
August 28, 1996
Filing Date:
August 20, 1993
Export Citation:
Assignee:
ANELVA CORP
International Classes:
G01N15/14; (IPC1-7): G01N15/14
Domestic Patent References:
| JPH02163631A |
Attorney, Agent or Firm:
田宮 寛祉